How Operating Conditions Influence Wafer Heater Design Choices

https://thermal-design-insights.moderncairn.com/posts/ito-glass-heater-integration-tips-for-transparent-equipment-surfaces

In wafer heating chucks, a wafer heater must deliver heat in a controlled way. It uses a controlled heating assembly designed to warm a wafer support or chuck. One useful trait is multi-zone control. Still, sensor offset can change the result