Designing Heating Zones in a Wafer Heater for Better Thermal Balance

https://thermal-solutions-journal.cavandoragh.org/mica-heating-plate-selection-checklist-for-engineering-projects

In wafer heating chucks, a wafer heater must deliver heat in a controlled way. It uses a controlled heating assembly designed to warm a wafer support or chuck. One useful trait is multi-zone control. Still, sensor offset can change the result